Consiglio Nazionalle delle Ricerche – CNR

Consiglio Nazionalle delle Ricerche – CNR
IMM (Institute of Microeletronics and Microsystems) includes 5 Departments, located in Bologna, Rome, Naples, Lecce and Catania. IMM belongs to the National Research Council of Italy (CNR), which is a nonprofit, partially government‐funded research organization, and the organisation with legal entity to act as partner in EU Framework Programmes . The Bologna Unit of IMM is one of the 9 institutes gathered since 1996 in a new research area located in Bologna with more than 400 employees among researchers, technical assistants and administrative personnel. The permanent staff of Bologna IMM unit consists of about 50 people plus 10‐15 % non‐permanent staff like visiting scientists, students, and associated professors. IMM owns in Bologna the largest public silicon micro/nanofabrication facility existing in Italy, which consists of a 500 m2 clean room composed by about 250 m2 of 100 class environments and other 250 m2 of 1000 and 10000 class environments. In this clean room, all the main technologies needed for MEMS (Micro‐Electro‐Mechanical‐System) and NEMS (Nano‐Electro‐Mechanical‐System) fabrication are available. During the last few years, the MEMS/NEMS group working at IMM in Bologna has been developing and investigating various innovative MEMS and NEMS technologies for sensing and actuation, mainly based on micro and nanofabrication, such as thermal MEMS for chemical sensing, Single‐Photon Avalanche Diodes (SPAD), silicon microfluidic devices for industrial automation and miniaturized gas chromatography, silicon MEMS resonators for strain sensing and top‐down fabricated silicon nanowires for thermoelectric energy conversion.
Website: CNR IMM
Partner's role
The main task of CNR‐IMM in SiNERGY will be the top‐down manufacturing of densely‐packed Si and silicide nanowires for integration in lateral and vertical thermoelectric harvesters in close cooperation with UNIMIB.
Research team: Alberto Roncaglia, Fulvio Mancarella.